Chemical Machining of Microscopic Holes and Grooves in Glass

This technique overcomes disadvantages of conventional macro- and micromachining.

A technique for making precise, microscopic holes and grooves in glass workpieces has been invented. The technique differs from both (1) traditional macroscopic mechanical drilling and milling and (2) conventional micromachining that involves etching through photolithographically patterned masks. The technique can be used, for example, to make holes between 20 µm and 1 mm in diameter.